ENGRMSE 264 Scanning Electron Microscopy (2015-2016)

ENGRMSE 264 Scanning Electron Microscopy

(Not required for any major.)
Catalog Data:

ENGRMSE 264 Scanning Electron Microscopy (Credit Units: 4) The theory and operation of the scanning electron microscope (SEM) and X-ray microanalysis. Topics covered include the basic design and electron optics, electron beam - specimen interactions, image formation and interpretation, X-ray spectrometry, and other related topics and techniques. Prerequisite: MSE 200. Graduate students only. (Design units: 0)

Required Textbook:
Recommended Textbook:
Relationship to Student Outcomes
No student outcomes specified.
Course Learning Outcomes. Students will:
Prerequisites by Topic

Course participants should have a basic understanding of:
* General Chemistry and Physics
* Use of units and significant figures in scientific/engineering calculations
* Atomic structure and chemical bonding
* Aspects of crystallography, symmetry, and periodicity in materials

Lecture Topics:
  • General discussion of course mechanics, goals, expectations, objectives and outcomes. Overview of the scope of the subject matter to be covered, as well as a general introduction to SEM technologies.
  • Experimental hardware and operational principles. Electron optics, electron guns, and operational considerations for each of the instrument types.
  • Electron beam – specimen interactions, and the concept of interaction volume.
  • Imaging various signals from the interaction volume, with a focus on secondary electrons and backscattered electrons.
  • Image formation, interpretation, and digital formats. The concept of magnification, resolution, focus, and depth of field. Digital formats and image manipulation.
  • Continuation of discussion on image formation and interpretation, including a discussion of detectors, contrast mechanisms, image quality and image processing. Imaging artifacts, and methods to eliminate or mitigate imaging artifacts.
  • Special topics in electron microscopy, including low voltage imaging for surface-sensitive imaging and analysis, high resolution imaging, stereomicroscopy, variable pressure SEM analysis, and dealing with electric or magnetic fields.
  • X-ray microanalysis, the generation of x-rays in the microscope and the qualitative analysis of material chemistry. Spectral measurements using energy dispersive spectroscopy (EDS).
  • Quantitative X-ray analysis.
  • Crystallographic analysis via electron backscatter diffraction (EBSD) analysis.
Class Schedule:

Meets for 3 hours of lecture and 2 hours of laboratory each week for 10 weeks.

Computer Usage:


Laboratory Projects:

There will be a series of demonstration labs. No formal lab periods will be held.

Professional Component
Design Content Description
Laboratory Portion:
Grading Criteria:
  • Midterm: 25%
  • Final: 35%
  • Homework and Exercises: 40%
    *TOTAL: 100%
Estimated ABET Category Content:

Mathematics and Basic Science: 0.0 credit units

Computing: 0.0 credit units

Engineering Topics: 0.0 credit units

Engineering Science: 0.0 credit units

Engineering Design: 0.0 credit units

October 7, 2015
Senate Approved:
April 29, 2013
Approved Effective:
2013 Fall Qtr