EECS 278 Micro-system Design (2012-2013)

EECS 278 Micro-system Design

(Not required for any major.)
Catalog Data:

EECS 278 Micro-system Design (Credit Units: 4) Covers the fundamentals of the many disciplines needed for design of Micro-Electro-Mechanical Systems (MEMS): microfabrication technology, structural mechanics on micro-scale, electrostatics, circuit interface, control, computer-aided design, and system integration. Graduate students only. Same as ENGRMAE 247. (Design units: 0)

Required Textbook:
Recommended Textbook:
. Edition, , 1969, ISBN-13 978-0792372462.

Relationship to Student Outcomes
No student outcomes specified.
Course Learning Outcomes. Students will:
Prerequisites by Topic
Lecture Topics:


Class Schedule:

Meets for 3 hours of lecture each week for 10 weeks.

Computer Usage:
Laboratory Projects:
Professional Component
Design Content Description
Laboratory Portion:
Grading Criteria:
Estimated ABET Category Content:

Mathematics and Basic Science: 0.0 credit units

Computing: 0.0 credit units

Engineering Topics: 0.0 credit units

Engineering Science: 0.0 credit units

Engineering Design: 0.0 credit units

February 6, 2012
Senate Approved:
January 8, 2008
Approved Effective:
2008 Fall Qtr